| 年份 | 产品分类 | 收入(万元) | 收入占比(%) | 成本占比(%) | 利润占比(%) | 毛利率(%) |
|---|---|---|---|---|---|---|
| 2025-12-31 | 半导体专用设备 | 629553 | 96.5707 | 97.9792 | 93.9494 | 34.0035 |
| 2024-12-31 | 半导体专用设备 | 395839 | 96.4649 | 97.7584 | 94.6554 | 40.9038 |
| 2023-12-31 | 薄膜沉积设备 | 257019 | 95.0175 | 95.4944 | 94.5595 | 50.7611 |
| 2022-12-31 | PECVD设备 | 156322 | 91.6546 | 91.3979 | 91.9189 | 49.4111 |
| 2021-12-31 | SACVD设备 | 4115 | 5.4302 | 3.5893 | 7.7722 | 62.992 |
| 2021-12-31 | PECVD设备 | 67543 | 89.1117 | 91.3009 | 86.3265 | 42.6353 |
| 2021-09-30 | 其中:PF-300T | 20692 | 55.3428 | 56.6433 | 53.8027 | 44.5103 |
| 2021-09-30 | 其中:PF-200T | 11590 | 30.9999 | 33.6399 | 27.8738 | 41.1673 |
| 2021-09-30 | SACVD设备 | 4115 | 11.0081 | 7.4854 | 15.1796 | 63.134 |
| 2021-09-30 | PECVD设备 | 32283 | 86.3427 | 90.2833 | 81.6765 | 43.31 |
| 2021-03-31 | 其他(补充) | 479 | 8.3095 | 4.4495 | 17.3103 | 62.5247 |
| 2021-03-31 | PECVD设备 | 5294 | 91.6905 | 95.5505 | 82.6897 | 27.0677 |
| 2020-12-31 | PECVD设备 | 41824 | 96.0098 | 93.9227 | 100.051 | 35.493 |
| 2019-12-31 | PECVD设备 | 24772 | 98.5962 | 98.3892 | 99.0392 | 31.9947 |
| 2018-12-31 | SACVD设备 | 1459 | 20.661 | 16.2416 | 30.1957 | 46.2866 |
| 2018-12-31 | PECVD设备 | 5170 | 73.1878 | 75.7837 | 67.5872 | 29.2474 |
| 年份 | 产品分类 | 收入(万元) | 收入占比(%) | 成本占比(%) | 利润占比(%) | 毛利率(%) |
|---|---|---|---|---|---|---|
| 2025-12-31 | 半导体设备 | 629553 | 96.5707 | 97.9792 | 93.9494 | 34.0035 |
| 2025-12-31 | 其他(补充) | 22265 | 3.4154 | 2.0208 | 6.0107 | 61.5121 |
| 2024-12-31 | 半导体设备 | 395839 | 96.4649 | 97.7584 | 94.6554 | 40.9038 |
| 2024-12-31 | 其他(补充) | 14494 | 3.5322 | 2.2416 | 5.3376 | 62.9928 |
| 2023-12-31 | 半导体设备 | 263449 | 97.3946 | 97.8795 | 96.9289 | 50.7631 |
| 2023-12-31 | 其他(补充) | 7047 | 2.6054 | 2.1205 | 3.0711 | 60.125 |
| 2022-12-31 | 半导体设备 | 168528 | 98.8113 | 98.9294 | 98.6897 | 49.2084 |
| 2022-12-31 | 其他(补充) | 2027 | 1.1887 | 1.0706 | 1.3103 | 54.3087 |
| 年份 | 产品分类 | 收入(万元) | 收入占比(%) | 成本占比(%) | 利润占比(%) | 毛利率(%) |
|---|---|---|---|---|---|---|
| 2025-12-31 | 其他(补充) | 22265 | 3.4154 | 2.0208 | 6.0107 | 61.5121 |
| 2025-12-31 | 国内 | 629644 | 96.5846 | 97.9792 | 93.9893 | 34.0131 |
| 2024-12-31 | 其他(补充) | 14494 | 3.5322 | 2.2416 | 5.3376 | 62.9928 |
| 2024-12-31 | 国内 | 395851 | 96.4678 | 97.7584 | 94.6624 | 40.9056 |
| 2023-12-31 | 其他(补充) | 7047 | 2.6054 | 2.1205 | 3.0711 | 60.125 |
| 2023-12-31 | 国内 | 263449 | 97.3946 | 97.8795 | 96.9289 | 50.7631 |
| 2022-12-31 | 其他(补充) | 2027 | 1.1887 | 1.0706 | 1.3103 | 54.3087 |
| 2022-12-31 | 国内 | 168528 | 98.8113 | 98.9294 | 98.6897 | 49.2084 |
| 2021-12-31 | 华南 | 7491 | 9.8831 | 9.5072 | 10.3613 | 46.1404 |
| 2021-12-31 | 华北 | 22561 | 29.7662 | 26.5703 | 33.8319 | 50.0222 |
| 2021-12-31 | 华中 | 19014 | 25.0863 | 28.9674 | 20.1489 | 35.3488 |
| 2021-12-31 | 华东 | 25454 | 33.5824 | 33.6091 | 33.5485 | 43.9664 |
| 2021-12-31 | 其他(补充) | 1274 | 1.6819 | 1.346 | 2.1093 | 55.1939 |
| 2021-09-30 | 华南地区 | 6031 | 16.1302 | 16.5137 | 15.676 | 44.4952 |
| 2021-09-30 | 华北地区 | 14684 | 39.2755 | 34.781 | 44.5977 | 51.9886 |
| 2021-09-30 | 华中地区 | 7216 | 19.3 | 24.1754 | 13.5267 | 32.0887 |
| 2021-09-30 | 华东地区 | 8466 | 22.6452 | 22.2985 | 23.0556 | 46.6142 |
| 2021-09-30 | 其他(补充) | 990 | 2.6492 | 2.2314 | 3.144 | 54.3353 |
| 2021-03-31 | 华南地区 | 950 | 16.4528 | 16.686 | 15.9091 | 29.0221 |
| 2021-03-31 | 华中地区 | 2746 | 47.5623 | 58.5265 | 21.9964 | 13.8807 |
| 2021-03-31 | 华东地区 | 1598 | 27.6753 | 20.338 | 44.7843 | 48.5687 |
| 2021-03-31 | 其他(补充) | 479 | 8.3095 | 4.4495 | 17.3103 | 62.5247 |
| 2020-12-31 | 华南 | 3141 | 7.2105 | 7.6532 | 6.3536 | 30.0119 |
| 2020-12-31 | 华北 | 18904 | 43.3971 | 45.1244 | 40.053 | 31.435 |
| 2020-12-31 | 华中 | 8218 | 18.8658 | 20.3677 | 15.9582 | 28.8103 |
| 2020-12-31 | 华东 | 12611 | 28.9507 | 25.1961 | 36.2195 | 42.6112 |
| 2020-12-31 | 其他(补充) | 686 | 1.5759 | 1.6586 | 1.4156 | 30.5964 |
| 2019-12-31 | 西南 | 1327 | 5.2833 | 4.8215 | 6.2713 | 37.8078 |
| 2019-12-31 | 西北 | 1500 | 5.9701 | 5.8025 | 6.3287 | 33.7645 |
| 2019-12-31 | 华北 | 10810 | 43.0246 | 42.4892 | 44.1701 | 32.6996 |
| 2019-12-31 | 华中 | 1373 | 5.4652 | 6.2299 | 3.8291 | 22.3162 |
| 2019-12-31 | 华东 | 9761 | 38.853 | 39.046 | 38.44 | 31.513 |
| 2019-12-31 | 其他(补充) | 352 | 1.4038 | 1.6108 | 0.9608 | 21.8007 |
| 2018-12-31 | 西南 | 2694 | 38.1412 | 37.3212 | 39.9101 | 33.1398 |
| 2018-12-31 | 华北 | 981 | 13.8865 | 17.8237 | 5.3923 | 12.2982 |
| 2018-12-31 | 华中 | 1494 | 21.1601 | 20.6388 | 22.2848 | 33.3543 |
| 2018-12-31 | 华东 | 1459 | 20.661 | 16.2416 | 30.1957 | 46.2866 |
| 2018-12-31 | 其他(补充) | 434 | 6.1512 | 7.9747 | 2.2172 | 11.4157 |